HITACHI - S-4700 (II) FE-SEM with Solid State IXRF EDX, BSE and STEM Detector

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The Hitachi S-4700 FE-SEM is a field emission high resolution scanning electron microscope. Under ideal conditions, it can magnify images up to 500kX and can resolve features down to 2nm. It also is equipped with an energy dispersive x-ray analysis tool to identify elemental materials. The specimen stage is capable of tilting up to 60 degrees with full 360 degrees in a continuous rotation and can accommodate a sample up to 100mm in diameter. The beam accelerating voltage is variable from 0.5-30 keV.

The list of system specifications :                     
1. Resolution:                    
  (1) Accelerating voltage 15kV, Working distance = 12mm : 1.5 nm                    
  (2) Accelerating voltage 1kV, Working distance = 2.5mm : 2.5 nm                    
2. Magnification:                     
    (1) High magnification mode : 100x to 500,000x                    
    (2) Low magnification mode : 20x to 2,000x                    
3. Electron optics :                    
    (1) Electron gun : Cold cathode field emission type                    
    (2) Extracting voltage (Vext) : 0 to 6.5 Kv                    
    (3) Accelerating voltage (Vacc) : 0.5 to 30 kV (in 0.1 kV steps)                    
    (4) Lens : 3-stage electromagnetic lens, reduction type                    
    (5) Objective lens aperture : Movable aperture (4 opening selectable/alignable outside column). Self-cleaning thin aperture                    
    (6) Astigmatism correction coil (stigmator) : Electromagnetic type                    
    (7) Scanning coil : 2-stage electromagnetic-deflection type                    
4. Specimen stage:                    
    (1) X/Y/Z range: 0-100mm/0-50mm/2.5~30mm (continuous)                    
    (2) Tilt angle: -5° ~ +60°                    
    (3) Rotation angle: 360°                    
    (4) Specimen size:  150 mm (diameter)                    
5. Secondary electron detector / Backscattered electron detector / STEM                    
6. Energy-dispersive X-ray spectra :  Solid State IXRF EDX