HITACHI - S-4800 (II) FE-SEM with Horiba 7593H EDS

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The Hitachi S-4800 field emission scanning electron microscope features a maximum resolution of 1.0 nm and a variable acceleration voltage of .5 - 30 kV. Both secondary electron and backscattering electron detectors are available for imaging.It features an image capture system for digital storage of images and image files can be transfered through network or USB drive. It can handle samples from piece-parts to 6" wafers. The stage can rotate 360° and tilt -5° to 70°.
It provides STEM imaging capability at 30kV, which may be useful for STEM imaging in biological samples that cannot withstand 200kV accelerating voltage in standard TEM.

Specifications for Hitachi Model S-4800 (II), Field Emission Scanning Electron Microscope
1. Resolution:
Accelerating voltage 15 kV
Working distance = 4 mm .............................. 1.0 nm
Accelerating voltage 1 kV
Working distance = 1.5 mm ........................... 2.0 nm
2. Magnification:
High magnification mode ............................... 100 to 800,000
Low magnification mode ................................ 30 to 2,000
3. Electron Optics:
(1) Electron gun .......................................... Cold cathode field emission type
(2) Extracting voltage (Vext) ....................... 0 to 6.5 kV
(3) Accelerating voltage (Vacc)................... 0.5 to 30 kV (in 100 V steps)
(4) Lens....................................................... 3-stage electromagnetic lens, reduction type
(5) Objective lens aperture.......................... Movable aperture (4 openings selectable/
alignable outside column).
Self-cleaning thin aperture
(6) Astigmatism correction coil
(stigmator) ............................................. Electromagnetic type
(7) Scanning coil ......................................... 2-stage electromagnetic-deflection type