HITACHI - S-2600N Scanning Electron Microscope (SEM)

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HITACHI S-2600N SEM, Specifications

1. Resolution :

(1) Secondary electron image resolution : 4.0 nm guaranteed (high vacuum mode)

(2) Backscattered electron image resolution : 5.0 nm guaranteed (Variable pressure mode)

2. Magnification : 15x to 300,000x

3. Electron Optics

(1) Filament : Pre-centered tungsten hairpin type (cartridge design)

(2) Gun bias : Auto bias

(3) Accelerating voltage : 0.5 to 30 kV / 0.5 to 5.0 kV (in increments of 0.1 kV) / 5.0 to 30 kV (in increments of 1.0 kV)

(4) Emission current : 10-12 to 10-7 A

(5) Gun alignment : Manual

(6) Condenser lens : 2-stage electromagnetic condenser

(7) Objective lens aperture : Fixed aperture (exchange between apertures of opening diameter 0.1 and 0.2 mm)

(8) Astigmatism correction : 8-pole electromagnetic X/Y correction

(9) Image shift : +-10 to +-40 um (W.D. = 5 to 35 mm)

 

4. Specimen Stage : Small-size eucentric stage

(1) Movable range : X = 20 mm, Y = 10 mm, Z = 5 to 35 mm

(2) Tilt angle : -20o to +70o

(3) Rotation angle : 360o (continuous)

(4) Max. specimen size : 60 mm (diameter)

 

Standard System Composition

Microscope block x 1

PC unit x 1

Oil rotary pump x 2

Standard tools x 1 set

Spares and consumables x 1 set

Instruction manual x 1 copy

 

More information available on request.