OXFORD - Plasmalab 133 ICP 380 Etcher

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PLASMALAB 133 ICP 380 ETCHER (SYSTEM 133 380 ICP), consisting of :

Reaction Chamber
ICP Electrode:
ADVANCED ENERGY 5KW RF Generator, HFV 8000

Lower Electrode: Ø380mm diameter
ADVANCED ENERGY 1250W RF Generator, RFG 1251 

Vacuum system:
ALCATEL / ADIXEN ATH 1300M Maglev turbo pump with ACT 1300M Controller
ALCATEL / ADIXEN ALCATEL / ADIXEN A103P Dry pump 
Base pressure is measured by an active Penning gauge

Auto Pressure Control system:
VAT control valve 64246-PE52 with PM-5 controller 
The process pressure is measured by a Capacitance Manometer gauge.

Load-lock Chamber:
ALCATEL / ADIXEN / ACP15 Dry pump 

Chiller: Julabo FP51

Gas pod configured with (5) MFCs : 

SF6 100 sccm / SiCl4 100 sccm / O2 100 sccm / Cl2 100 sccm / AR 100 sccm

Computer with PC2000 (WINDOWS system/LCD Monitor/Keyboard/Mouse)

Power : 415V 50/60Hz

 

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of: 
- Chamber received full wet clean - Chamber o-rings and seals are replaced with brand new
- Electrostatic Chuck (ESC) sent out for refurbishment 
- All MFCs rebuilt and calibrated professionally 
- All corrosive gas lines replaced with brand new 
- All Non-corrosive gas lines cleaned - Vacuum pumps professionally rebuilt
- Turbo pump professionally rebuilt
- Chillers serviced and fully tested - All wiring/wire harnesses are checked, repaired or replaced
- All liquid and air lines, tubing and fittings checked and replaced
- Major components disassembled for checkout, servicing, cleaning, and lubricating 
- parts are repaired or replaced as needed 
- Checkout of all electronic and mechanical parts 
- Machine covers are cleaned, polished or replaced as needed 
- Equipment is fully tested to verify compliance to specifications
- Post-refurbishment system leak checks, with documentation to customer
- System cycle and repeatability testing completed prior to cover replacement and wipe down
- System components carefully packed, and professionally crated

CONDITION:
Excellent Condition Guaranteed.
3 Month Warranty and Full Specifications Guarantee.