EFAB - E-500 Ion Implantation System
- Listing ID# 3500002
- Manufacturer: EFAB -
- Model: E-500 Ion Implantation System
- Vintage: 2005
- Status: Re-Installed
Varian E-500 System
Vintage 1994, Upgraded to e500 2005
Set up for 6 inch wafers
Deinstalled Feb 2015 In warehouse