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TEL : +886-4-2534-7800
FAX : +886-4-2534-8869
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CELL : +886-922-111-308
Company ID：24829839
TEL : +886-4-2534-7800
FAX : +886-4-2534-8869
CELL : +886-922-111-308
Company ID：24829839
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Varian E500HP Implanter System
• Façade says E220HP, but serial plate says E500-1996-may have been a change order or upgraded after initial purchase
• De-installed from good complete running condition and now plastic wrapped in clean dry storage
• 200mm, SNNF system
• From de-installation notes
o Load-Lock: OK
o Transfer Robot: OK
o Single wafer process
o Controller Type: Ver 12.10.21
o Max Beam Energy: 250KeV
o Dry-Pumps:
o Load-Lock: EBARA 40X20
o Process Chamber: EBARA 40X20
o Stage: EBARA 50X20
o ION Source: EBARA 40X20
o UPS
• Sources and Gases used in production: AsH3, PH3, BF3, Ar, N2
o 4 SDS slots in gas box
• Note: First photo set are from in fab and during de-install