UNISEM - MAGMA3000 Bulk Heat-Wet Scrubber

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Model: MAGMA3000

Bulk Heat-Wet Scrubber responding to LED, LCD

Model: MAGMA3000

Gas Process Method: HEAT WET

Processing capacity: 1500LPM

Dimension(Cabinet)1280(W)X1300(D)X1850(H)

System Features

1. Type: Heat-Wet

2. Perfect abatement efficiency for flammable & water soluble gases

3. Minimizing moisture vapor exhaust(Apply dry system)

4. Excellent safety interlock system

5. Relatively lower operation cost

6. Simple operation and easy maintenance(Heater easy PM, Cylinder structure)

7. High corrosion resistance structure (Teflon Insert Lining)

8. SEMI-S2 certified

Target abatement gas

1. Flammable gases: SiH4, PH3, TEOS, H2, DCS, etc

2. Water soluble gases: Cl2, HCl, HF, NH3, etc

3. PFCs: NF3