HP-480-V-Purge Hydrogen Purifiers ( 220SLPM = 13.2Nm3/hr )
Applications:
• MOCVD epi
• Photovoltaic processes
• Silicon carbide
• Bulk gas purification
Design Features:
• Outlet impurities: < 1 ppb, O2, H2O, CO, CO2, N2, THC
• Inlet gas purity: minimum 99.99% H2
• “Outside In” diffusion cell design
• Automated Purge requires no manual adjustments of bleed flow rate (eliminates bleed and purge bypass flowmeters)
• Separate controller & purification cabinet
• Flow rate up to 220 slpm
• Single active heater with passive preheater
• 3 operating modes – purify, idle, purge
• RS485 Network capability-modbus slave
• CE compliant, purifier enclosure is ATEX compliant
Benefits:
• Palladium membrane removes all impurities, provides the
purest hydrogen possible
• Less than 10 minutes to remove all hydrogen when automated purge is activated
• Switches from nitrogen purge to maximum hydrogen flow capacity immediately (vs. conventional system start-up that takes over an hour to reach full flow rate)
– No delay caused by trapped N2
– Minimal temperature variation, ±5ºC
– Faster cycle times
• Eliminates pressure surge when switched from nitrogen purge to hydrogen service
• All H2 removed prior to cell cooling
• Improved heat management maintains heat longer during power failures, dramatically slowing heat losses and the
cooling effect after power to the heaters is lost