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SPP - MUC-21-098 DEEP Si RIE Etching System

SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
SPP - MUC-21-098 DEEP Si RIE Etching System
  • Listing ID# 1161229
  • Manufacturer: SPP -
  • Model: MUC-21-098 DEEP Si RIE Etching System
  • Vintage: 2009
  • Status: De-installation

SPP(Sumitomo Precision Products) MUC-21-098 DEEP Si RIE Etching System

Initial specifications

Coil RF Generator：13.56 MHz/1 KW（MKS ACG-10）

RF Generator for Platen use ：13.56 MHz/100W（Pearl Kogyo) RP-100C2-13M)

Operating system : PC

Exhaust system : Turbo Molecular - OV TG-900 (for process use）

Rotary (FORE for process use）

Rotary (for ROUGH use）

Gas ：Ar, O2, SF6, C4F8

Control System： Sequencer（Mitsubishi MELSEL Ａ１）

More information available on request.