ELS - ELS 106SA Semi-Auto Mask Aligner

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 Type: ELS106SA

Work Size: 2"~6" wafer/ 100 x 100 mm

Mask Size: 4"~7" Mask

Lamp House: 250W & 500W

Wave lenght: Broad Band (365 / 400 / 436 nm)

Light Intensity: > 20 mW/cm2 Based on 365 nm (250W), >40 mW/cm2 Based on 365nm (500W)

Light Intensity Uniformity: < 3%

Effective Exposure Area: Max. 150 mm x 150 mm

Leveling: Auto

Contact Mode: Auto

Exposure Mode: Proximity / Soft / Hard / Vac. Contact

Alignment Accuracy: +- 1um

L/S Resolution: 1um Based on Contact Mode, PR Thickness : 1 um

Antivibration Table: Yes

System  Control: PC Base

Option: Cut Filter/Double Sides Alignment

More information available on request.