Aixtron MOCVD - Parts / Filter / Aixtron Filter cartridges , 25um

  • 4070002
  • 4070002

Filter Material: Fiber

O-Ring Material: EPDM

Support material: SUS304 galvanized

The air permeability (AIR Permeability): 180 cc / cm2 / sec @ 1/2 "g (CFM)

Weight (weight): 270 g / m2

Filtering accuracy (mesh): 25um (85%)

Operation Constant Temperature: 90 ℃

Maximun Operation Temperature: 120 ℃

Resistance to organic solvent: Fit

Resistance to ocid: Fit

Resistance to oxidize: Good

 

More information available on request.