Configuration:
TurboDisc K465i HP GaN , 5X6"(54x2')
System equipped with RealTemp 200 Monitoring System, DRT-210 Real-time In-situ Monitoring System and 1 Piezocon Gas Concentration Sensor for TMIn.
Hydride : NH3-1, NH3-2, SiH4,
Source :TMGa-1, TMGa-2, TMAl, TEGa, Cp2Mg-1, Cp2Mg-2,TMIn-1, TMIn-2
System equipped with 2 EBARA ESA25WD pump, 2 LYTRON Heat Exchangers, 2 RE235 and 2 RE215 thermal baths
More information available on request.