EPITECH Inc. ET-100ZNO-RM, ZnO MOCVD system for Solar Cell

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Model : ET-100ZNO-RM, ZnO MOCVD system for Solar cell development

MO source line : DEZn x 1, TEB x 1, Cp2Mg x 1, H2O x 1,

Vacuum degree: 10 × -5Pa or less
Exhaust system: Turbo molecular pump + oil rotary pump
Plate heater: Maximum temperature 400 ° C (higher temperature specifications are also possible)
PID control
It can also handle rotation:
The flow-controlled gas can be supplied evenly in the board surface by the shower nozzle MFC:
Material gas supply system.

More information available on request.