HE 80 Hydrogen Purifier
FLOW RATE: 75 Nl/min (25Nl/min unitx3), when supplied with hydrogen to input specification 14 bar g.
Converted HE-80 Purifier from one 80 Nl/min Pd-Cell to 3 25Nl/min Pd-Cell.
Applications:
• MOCVD epi
• Photovoltaic processes
• Silicon carbide
• Bulk gas purification
Gas Pressures, Rates and Outputs:
Impure hydrogen regulated pressure 10 bar g to 24 bar g
Impure nitrogen regulated pressure 5 bar g to 24 bar g
Instrument Nitrogen/Air 7 bar g
Bleed rate up to 5% of the impure input gas
Electrical Power Requirements:
Main Power Supply for purifier heater:
220/240V single phase 50Hz 1.5kW
More information available on request.