Configuration:
TurboDisc K465i HP GaN , 5X6'' (12X4") (54x2'')
System equipped with 3 RealTemp 200 In-situ Monitoring System.
Hydride : NH3-1, NH3-2, SiH4,
Source :TMGa-1, TEGa, TMAl-1, TMAl-2 (dilution gas line), Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2
System equipped with with 2 EBARA ESA25WD pump, 2 LYTRON Heat Exchangers, 2 RE235 and 3 RE215 thermal baths
More information available on request.