Configuration:
TurboDisc K465i HP GaN , 5X6'' (12X4") (54x2'')
System equipped with RealTemp 200 Monitoring System and DRT-210 Real-time In-situ Monitoring System.
Hydride : NH3-1, NH3-2, SiH4,
Source :TMGa-1, TMGa-2, TEGa, TMAl, Cp2Mg, TMIn-1, TMIn-2
System equipped with with 2 EBARA ESA25WD pump, 2 LYTRON Heat Exchangers, 4 RE235 and 1 RE215 thermal baths
More information available on request.