OXFORD - Plasmalab 133 ICP 380 Etcher

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OXFORD PLASMALAB 133 ICP 380 ETCHER consisting of:
- Model: Plasmalab 133 ICP
- Inductive Coupled Plasma Source (ICP380)
- Load-locked single chamber (ICP)
- Electrode: 380mm
- Alcatel ATH1300M Maglev Turbo Pump
- Alcatel Adixen ACT 1300M Controller
 -Advanced Energy RF Power Generator
- Computer with PC2000
- LCD Monitor, Keyboard, and Mouse
- Alcatel Adixen ADP 122 P Vacuum Pump
- Alcatel CP 40G Vacuum Pump
- Chiller
- EMO Button 
- Operations Manual and Documentation
- Offered as Fully Refurbished and meeting Original Specifications.

GAS POD CONFIGURED WITH 6 MFCS consisting of:
BCL3 @ 50 SCCM, CL2 @ 50 SCCM, CH4 @ 100 SCCM, O2 @ 200 SCCM, AR @ 100 SCCM, H2 @ 50 SCCM

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of: 
- Chamber disassembled for refurbishment
- Chamber received full wet clean
- Chamber o-rings and seals are replaced with brand new
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally
- All corrosive gas lines replaced with brand new
- All Non-corrosive gas lines cleaned
- Vacuum pumps professionally rebuilt 
- Turbo pump professionally rebuilt
- Chillers serviced and fully tested
- All wiring/wire harnesses are checked, repaired or replaced if needed
- All liquid and air lines, tubing and fittings checked and replaced if necessary
- Major components disassembled for checkout, servicing, cleaning, and lubricating - parts are repaired or replaced as needed
- Checkout of all electronic and mechanical parts
- Machine covers are cleaned, polished or replaced as needed
- Equipment is fully tested to verify compliance to specifications
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer
- System cycle and repeatability testing completed prior to cover replacement and wipe down
- System components carefully packed, labeled, and professionally crated

CONDITION:
Excellent Condition Guaranteed.
6 Month Warranty and Full Specifications Guarantee.