VVT - HBM-650G Vacuum Burnout Furnace

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Furnace is

• Vacuum Burnout Furnace is designed to support LED manufacturing in cleaning MOCVD deposits on the graphite platters / susceptors in heating process.

• The maximum operating temperature is 1400 ℃, so the heating materials used for hightemperature high-density graphite, heat resistance heating principle and Multi-layer graphite felt, graphite sheet and water-cooled chamber.

 

Benefits

• Maintain high performance of graphite platters by removing contaminating residues and deposits.

• Reclaimed wafers polishing and cleaning in LED industry.

 

More information availabloe upon request.