Aixtron MOCVD - Parts / Aixtron Crius 31x2" / OEM PN : 100000727 (0-30800A) Aixtron Crius 31x2" Tungsten Heater Assy. All Zones

  • 4050013

W (tungsten) Heater Zone ASSY ALL ZONES

Application equipment:

1) Type –  AIXTRON CRIUS 31(30) x 2” ASSY ALL ZONES

2) Test Condition

    Temperature ; ~ 1400oC

3) Change 1 mm to 2 mm for PBN thickness to reduce risk of failure phenomenon.

4) Result

    Life time; more than 2,000Hr

5)  It is possible for overhaul

(Break up -> Cleaning -> Parts change -> Assembling)

.Functional improvements & Performance enhancement