Aixtron MOCVD - Parts / Aixtron Crius 31x2" / OEM PN : 100000728 Aixtron Crius 31x2" Tungsten Heater , ZoneA

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W (tungsten) Heater Zone A

Application equipment:

1) Type –  AIXTRON CRIUS 31(30) x 2” Zone A 

2) Test Condition

    Temperature ; ~ 1400oC

3) Change 1 mm to 2 mm for PBN thickness to reduce risk of failure phenomenon.

4) Result

    Life time; more than 2,000Hr

5)  It is possible for overhaul

(Break up -> Cleaning -> Parts change -> Assembling)

.Functional improvements & Performance enhancement