Aixtron MOCVD - Parts / Aixtron 2800G4 HT / (OEM PN 100001859) Aixtron Filter cartridges CT500/CT1000

  • 4030020

FILTER PERFORMANCE TABLE        

Product Name   :  Particle filters    

Cotton material :   POLYSTER   

Gasket Material  :   POLYSTER   

Support materials :    SUS#304   

AIR Permeability:  125 cc/cm2/sec.0.52,w.g.(CFM)   

weight : 520 g/m2   

thickish : 0.5 m/m (75~150 um)   

burstingstrength : 35 kg/cm2   

Operation Constant Temperature : 260 C   

Maximun Operation Temperature : 300 C   

Resistance to organic solvent : Very Good   

Resistance to ocid : Good   

Resistance to oxidize : Very Good