PVD / PVD / SYSKEY Technology SYSKEY Technology LAB PVD

  • 4000001

 

Configuration:
 
up to 6 crucibles
2~8" substrate, or multi-sample dome
Substrate: rotation, heating
10-7 to 10-9 Torr ultimate base pressure
Fully Automation
 
Power source
200V~220V
 
Width 1450*Depth 1100*Height1900mm