MOCVD (FEOL) Equipment / Photoluminescence / EtaMax PL+ M100

  • 1151011
  • 1151011
  • 1151011
  • 1151011
  • 1151011
  • 1151011

Configuration:

 

This system is a combination of the EpiPlus and EtaMax hardware/software and running as an EtaMax Platom manual loading system.  The system is set up for 2" wafers and can run 4" as well.

 

System operates in dual mode measuring both PL and thickness at the same time.  System measures PL(Blue), PL (UV), PL + RF and RF.  Software allows for custom susceptor design to display result per wafer loaded pockets.

Laser System - 375nm laser : Max Power 16mW(Power adjustable)

 

Full specifications available upon request.