MOCVD (FEOL) Equipment / Pumps / Ebara ESA70W-D DRY PUMP

  • 1401022
  • 1401022



Ebara ESA70W-D pump used on Aixtron GaN systems.  This pump has recent overhaul and is excellent condition.  Pump tested and ready for installation.


The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.


  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked


More information available upon request.