MOCVD (FEOL) Equipment / Pumps / Ebara A25-S

  • 1401026
  • 1401026

Configuration:

 

Ebara A25-S with recent overhaul and used for Aixtron GaN system.  This pump has recent overhaul and is in excellent condition.  Pump tested and is ready for installation.

 

The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

 

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

 

More information is available upon request.