Semiconductor Manufacturing Equipment / Implanters. / Varian E-500HP Ion Implantation System

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Varian E500HP Implanter System

Façade says E220HP, but serial plate says E500-1996-may have been a change order or upgraded after initial  purchase

De-installed from good complete running condition and now plastic wrapped in clean dry storage

200mm, SNNF system

From de-installation notes

o Load-Lock: OK

o Transfer Robot: OK

o Single wafer process

o Controller Type: Ver 12.10.21

o Max Beam Energy: 250KeV

o Dry-Pumps: 

o Load-Lock: EBARA 40X20

o Process Chamber: EBARA 40X20

o Stage: EBARA 50X20

o ION Source: EBARA 40X20

o UPS

Sources and Gases used in production: AsH3, PH3, BF3, Ar, N2

o 4 SDS slots in gas box

Note: First photo set are from in fab and during de-install