MOCVD (BEOL) Equipment / Probers / PACIFIC WESTERN SYSTEMS Inc. P4 SEMI-AUTOMATIC WAFER PROBING SYSTEM

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  • 2061024

Increasing demand for Optical Devices has created the need for a mapping system capable of stepping small steps - 300 microns or less - with speed and accuracy.  

The Probe 4 excels at fulfilling this need: it can step these devices with speed (less than 120 ms per 300 micron step), and with an accuracy repeatability of 6 microns or better.

An innovative new feature of the P4 is the Air Bearing Motion System (ABMS), which utilizes a proprietary lead screw with a formed lead nut to produce a near backlash-free X-Y stage motion.  

The X-Y stage moves on a friction-free, low-volume and low-pressure film of air during stage movement.

The stage rests on three precision pads located on a lapped surface plate during test.  

ABMS improves X-Y stepping accuracy and repeatability, and when combined with the PWS lead screw/ lead nut interface, it ensures superior accuracy, repeatability, and long life with minimum maintenance.

System Features Include:

Vision System

Adjustable Probe Head

Probe Cards

X-Y Microscope Translation (Optional)

 

P4 Specifications:

Stage Travel:  (6.8 in. X) (10.5 in. Y)

Theta Rotation:  +/- 7.5 degrees

Chuck Planarization:  +/- .0005 inches

Stage Accuracy:  +/- .00025 inches

Stage Resolution:  .0001 inch

Scanning Speed*:  5 inches/second

Repeatability:  +/- .05 mils.

More information available on request.