MOCVD (FEOL) Equipment / Laser / Disco DFL7160,Fully automatic laser saw

  • 1180008
  • 1180008
  • 1180008
  • 1180008
  • 1180008

DFL7160, Fully automatic laser saw

 

Workpiece Size (mm) : φ300

X-axis (Chuck table) :

Processing range (mm) : 310

Max. processing speed (mm/s) : 0.1 - 600

 

Y-axis (Chuck table) :

Y-axis / Processing range (mm) : 310

Index step (mm) : 0.0001

Index positioning accuracy : 0.003/310 (Single error)0.002/5

Scale resolution (mm) : 0.0001

 

Z-axis :

Moving resolution (mm) : 0.00005

Repeatability accuracy (mm) : 0.002

 

θ-axis (Chuck table) Max. rotating angle (deg.) : 380

 

Machine dimensions (W x D x H) (mm) : 1,200 × 1,550 × 1,800

Machine weight (kg) : Approx.1,750

More information available on request.