MOCVD (FEOL) Equipment / Photoluminescence / Nanometrics ACCENT RPM2000 Rapid Photoluminescence Mapper with 532nm laser

  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042
  • 1151042

The RPM2000 Rapid Photoluminescence Mapper is a fast, room temperature photoluminescence (PL) mapping system suitable for use in R&D, production and quality control environments.
Photoluminescence is a well-established, non-contact, non-destructive technique used in the development and process control of semiconductors, with room temperature PL wafer maps giving vital information on the uniformity of alloy composition, material quality and defects in substrates, epilayers and device structures.
The RPM2000 has been designed specifically to obtain whole wafer PL maps in a mere fraction of the time previously associated with this sort of measurement, giving the ability to measure and assess wafers between production runs. The primary benefit is that rapid feedback and remedial action can be implemented should wafer parameters be out of specification, avoiding wasted production runs thus saving time and costs. In addition, the speed of measurement also makes the incoming inspection and qualification of bought-in wafers a quick and easy task.

With the RPM2000, mapping every wafer is no longer a dream.

Laser System - 405nm laser
RPM DATA Acquisition , Version 8.86
Operating System : Window XP
System Dimensions :
780mm(w) x 700mm(D) x510mm(H)
Weight excluding PC : 78kg
Services required :
Single phase AC 100V-240V, 400VA
Light vacuum for wafer chuck.