MOCVD (FEOL) Equipment / Mask Aligners / ELS ELS 106SA, Semi-Auto Mask Aligner, SOLD

  • 1141101
  • 1141101

 Type : ELS106SA

Work Size : 2"~6" wafer/ 100 x 100 mm

Mask Size : 4"~7" Mask

Lamp House : 250W & 500W

Wave lenght : Broad Band (365 / 400 / 436 nm )

Light Intensity : > 20 mW/cm2 Based on 365 nm (250W) , >40 mW/cm2 Based on 365nm (500W)

Light Intensity Uniformity : < 3%

Effective Exposure Area : Max. 150 mm x 150 mm

Leveling : Auto

Contact Mode : Auto

Exposure Mode : Proximity / Soft / Hard / Vac. Contact

Alignment Accuracy : +- 1um

L/S Resolution : 1um Based on Contact Mode, PR Thickness : 1 um

Antivibration Table : Yes

System  Control : PC Base

Option : Cut Filter / Double Sides Alignment