MOCVD (FEOL) Equipment / Reactors / Aixtron AIX2800G4 HT , 6x6'' (42x2") GaN

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Configuration:

AIXTRON 2800G4 HT , 6x6'' (42x2") GaN .

The system is installed and available for demonstration by appointment.

System equipped with EpiTT and two Epison 4.

 

Source configuration

Source : TMGa-1, TMGa-2, TEGa-1,TEGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2.

 

Equipped with (4) RM 6S and (2) RM 25Sthermal baths

More information available on request.