MOCVD (FEOL) Equipment / Reactors / Aixtron IC2 G5 HT , 8x6" GaN

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Configuration:

Aixtron G5 IC2 HT 8x6'' GaN , 2011 model MOCVD system EpiCurve TT. 

Hydride Lines - NH3_1 / NH3_2 / SiH4/H2 with DD

Gas Distribution system confirgured as follows:

MO Source :TMGa-1, TMGa-2, TMAl-1, TMAl-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEG-1

Equipped with (5) RM 6S and (2) RM 25S thermal baths

More information available on request.