MOCVD (FEOL) Equipment / Reactors / Aixtron 2800G4 HT, 11x4" (42x2") GaN

  • 1011171
  • 1011171
  • 1011171
  • 1011171
  • 1011171
  • 1011171
  • 1011171

Configuration:

AIXTRON 2800G4 HT , 11x4'' (42x2") GaN .

The system is installed and available for demonstration by appointment.

System equipped with EpiTT.

 

Source configuration

Source : TMGa-1,TEGa-1,TEGa-2, TMAl-1, Cp2Mg-1, TMIn-1, TMIn-2, Spare*2 sets.

Equipped with (5) RM 6S and (2) RM 25Sthermal baths

 

More information available on request.