MOCVD (FEOL) Equipment / Reactors / Aixtron Crius I, 31x2" IC, GaN with EpiCurve, TwinTT and Epison 4

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  • 1002207
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  • 1002207
  • 1002207
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  • 1002207
  • 1002207
  • 1002207
  • 1002207
  • 1002207
  • 1002207

Crius I, 31x2'' IC, GaN
System equipped with EpiCurve, TwinTT and Epison 4 and 2 sets Epison4 unit.
Source :TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2
More information available on request.