MOCVD (FEOL) Equipment / Reactors / Aixtron Crius II , 55x2" GaN

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Crius II, 55x2'' GaN

System equipped with Interferometer, Agus and 2 sets Epison4 unit.

Source :TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, 1 Spare

More information available on request.