MOCVD (FEOL) Equipment / Reactors / Aixtron Crius II , 13x4" GaN

  • 1002002
  • 1002002
  • 1002002
  • 1002002
  • 1002002
  • 1002002
  • 1002002

Configuration :

Crius II, 13x4'' GaN

The system is installed and available for demonstration by appointment.

System equipped with EpiCurve ,Argus and Epi Twin TT.

 

Source configuration :

TMGa-1, TMGa-2, TEGa-1, TEGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, 

System equipped with 2 RM 25S and 3 RM 6S thermal baths.

 

More information available on request.