MOCVD (FEOL) Equipment / Reactors / VEECO TurboDisc K465i GaN , 12x4"(54x2")

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Configuration:

TurboDisc K465i GaN MOCVD system , 3x8" or 5x6" or 54x2'

Source :TMGa-1, TMGa-2, TEG,TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEGa-1, TEGa-2

System equipped with 2 RE235 and 3 RE215 thermal baths

More information available on request.