MOCVD (FEOL) Equipment / Reactors / VEECO TurboDisc K465i HP, GaN

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Configuration:

TurboDisc K465i GaN MOCVD system , 3x8" or 5x6" or 54x2'

Source :TMGa-1, TEMGa-1, TMAl-1, TMAl-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2,

System equipped with 2 RE235 and 3 RE215 thermal baths

More information available on request.