MOCVD (FEOL) Equipment / Reactors / VEECO TurboDisc E450 LDM MOCVD System,13x4"(5x6"), SOLD

  • 1001112
  • 1001112
  • 1001112
  • 1001112
  • 1001112
  • 1001112

Configuration:

 

The system is installed and available for demonstration by appointment.

 

MO Source Line :

TMGa-1,TMGa-2,TMIn-1,TMIn-2,TMAl-1,TMAl-2,Cp2Mg,DEZn.

 

Hydride Source Line :

AsH3 x 1 ,PH3 x 1 ,Dopant A Si2H6 x 2 ,Dopant B Spare x 1

 

System equipped with Veeco Epiview Control Software, Veeco Real Temp Pyrometers, Ebara A70 Multi-stage Vacuum Pump.

 

Equipped with 5 sets RE215 and 1 set RE221 thermal baths

 

More information availabloe upon request.