(Sold Out) Aixtron Crius R , QXP-8300

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Configuration:
Aixtron Crius-R QXP-8300 200mm 6inch GaN , 2012 model MOCVD system withEpicurveTT and Gap Adjustment.

Gas Distribution Confirgured as follows:
Hydride Lines : NH3 Line x 2 , 
Dopant Lines : SiH4/H2 200ppm with dilution x 1, SiH4 100% x 1
MO Source :TMGa x 2, TMAl x 2, Cp2Mg x 1,  TMIn x 1,
Equipped with 6 RM 6S thermal baths

More information available on request.